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Tribology Issues and Opportunities in MEMS : Proceedings of the NSF/AFOSR/ASME Workshop on Tribology Issues and Opportunities in MEMS held in Columbus, Ohio, U.S.A., 9–11 November...

Published 1998

Springer Netherlands

Table of Contents: “... Nanoindentation Techniques -- Stress in Thin Films for MEMS Actuators -- Reliability and Fatigue Testing of MEMS...”