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author_facet:"American Chemical Society"
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Microelectronics processing : chemical engineering aspects
Published 1989
American Chemical Society
Subjects:
“
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Microlithography
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”
Call Number:
TK7874
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621 - Applied physics
1
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English
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ACS Advances in Chemistry
1
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American Chemical Society
Hess, Dennis W.
1
Jensen, Klavs F.
1
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