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22microelectromechanical systems » microelectromechanical systems, microelectromechanical system, nanoelectromechanical systems

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by Free, Charles E., Aitchison, Colin S.
Published 2021
John Wiley & Sons, Inc.
Table of Contents: ... Transistors) -- 10.2.3 MEMS (Microelectromechanical Systems) -- 10.2.4 IPCS (Inline Phase Change Switch...