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author_facet:"Žukauskaitė, Agnė"
dewey-ones:"530 - Physics"
dewey-ones:"600 - Technology"
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Piezoelectric Aluminium Scandium Nitride (AlScN) Thin Films: Material Development and Applications in Microdevices
by
Žukauskaitė, Agnė
Published 2023
MDPI - Multidisciplinary Digital Publishing Institute
Subjects:
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