Lithography
Lithography, the fundamental fabrication process of semiconductor devices, plays a critical role in micro- and nano-fabrications and the revolution in high density integrated circuits. This book is the result of inspirations and contributions from many researchers worldwide. Although the inclusion o...
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| Format: | eBook |
| Language: | English |
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IntechOpen
2010
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| Collection: | Directory of Open Access Books - Collection details see MPG.ReNa |
| Summary: | Lithography, the fundamental fabrication process of semiconductor devices, plays a critical role in micro- and nano-fabrications and the revolution in high density integrated circuits. This book is the result of inspirations and contributions from many researchers worldwide. Although the inclusion of the book chapters may not be a complete representation of all lithographic arts, it does represent a good collection of contributions in this field. We hope readers will enjoy reading the book as much as we have enjoyed bringing it together. We would like to thank all contributors and authors of this book. |
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| Item Description: | Creative Commons (cc), https://creativecommons.org/licenses/by-nc-sa/3.0/ |
| Physical Description: | 1 electronic resource (678 p.) |
| ISBN: | 9789533070643 9789535145615 45639 |