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21
Published 2003
Springer Berlin Heidelberg
“...Microtechnology and MEMS...”
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22
by Elwenspoek, M., Wiegerink, R.
Published 2001
Springer Berlin Heidelberg
“...Microtechnology and MEMS...”
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23
by Wong, Basil T., Mengüç, Pinar M.
Published 2008
Springer Berlin Heidelberg
“...Microtechnology and MEMS...”
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24
Published 2013
Springer Berlin Heidelberg
“...Microtechnology and MEMS...”
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25
by Wang, Zhong Lin, Zhang, Yan, Hu, Weiguo
Published 2023
Springer Nature Switzerland
“...Microtechnology and MEMS...”