|
|
|
|
| LEADER |
01930nma a2200397 u 4500 |
| 001 |
EB002039767 |
| 003 |
EBX01000000000000001183433 |
| 005 |
00000000000000.0 |
| 007 |
cr||||||||||||||||||||| |
| 008 |
220822 ||| deu |
| 020 |
|
|
|a 1000136062
|
| 020 |
|
|
|a 9783731511212
|
| 100 |
1 |
|
|a Kopf, Marlene
|
| 245 |
0 |
0 |
|a Langzeitstabilität der Innendrücke von Kavernen benachbarter MEMS-Sensoren auf Siliziumbasis
|h Elektronische Ressource
|
| 260 |
|
|
|a Karlsruhe
|b KIT Scientific Publishing
|c 2022
|
| 300 |
|
|
|a 1 electronic resource (220 p.)
|
| 653 |
|
|
|a Q-Faktor
|
| 653 |
|
|
|a Dämpfung
|
| 653 |
|
|
|a Mechanical engineering & materials / bicssc
|
| 653 |
|
|
|a inertial sensor
|
| 653 |
|
|
|a MEMS sensor
|
| 653 |
|
|
|a Inertialsensor
|
| 653 |
|
|
|a damping atmosphere
|
| 653 |
|
|
|a MEMS-Sensor
|
| 653 |
|
|
|a Q factor
|
| 653 |
|
|
|a Drehratensensor
|
| 653 |
|
|
|a gyroscope
|
| 041 |
0 |
7 |
|a deu
|2 ISO 639-2
|
| 989 |
|
|
|b DOAB
|a Directory of Open Access Books
|
| 490 |
0 |
|
|a Schriften des Instituts für Mikrostrukturtechnik am Karlsruher Institut für Technologie
|
| 500 |
|
|
|a Creative Commons (cc), by-sa/4.0, http://creativecommons.org/licenses/by-sa/4.0
|
| 028 |
5 |
0 |
|a 10.5445/KSP/1000136062
|
| 856 |
4 |
2 |
|u https://directory.doabooks.org/handle/20.500.12854/80561
|z DOAB: description of the publication
|
| 856 |
4 |
0 |
|u https://library.oapen.org/bitstream/20.500.12657/53694/1/9783731511212.pdf
|7 0
|x Verlag
|3 Volltext
|
| 082 |
0 |
|
|a 620
|
| 520 |
|
|
|a Due to a trend towards miniaturization of many MEMS devices and thus also the cavity volumes of inertial sensors, the influence of slight changes in the damping atmosphere in sensor cavities on the reliability of the sensors is increasing. In this work, mechanisms affecting the pressure stability of gyroscopes are investigated and countermeasures are presented. A focus is placed on desorption sources as well as gas diffusion paths in the sensor layer stack.
|