X-ray optics made by X-ray lithography: Process optimization and quality control

Grating based X-ray phase contrast imaging sets out to overcome the limits of conventional X-ray imaging in the detection of subtle density differences and opens a way to characterize a sample's microstructure without the need for ultrahigh spatial resolution. The technique relies on grating st...

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Bibliographic Details
Main Author: Koch, Frieder Johannes
Format: eBook
Language:English
Published: KIT Scientific Publishing 2017
Series:Schriften des Instituts für Mikrostrukturtechnik am Karlsruher Institut für Technologie / Hrsg.: Institut für Mikrostrukturtechnik
Subjects:
Online Access:
Collection: Directory of Open Access Books - Collection details see MPG.ReNa
Description
Summary:Grating based X-ray phase contrast imaging sets out to overcome the limits of conventional X-ray imaging in the detection of subtle density differences and opens a way to characterize a sample's microstructure without the need for ultrahigh spatial resolution. The technique relies on grating structures with micrometric periods and extreme aspect ratio - their fabrication by X-ray lithography with optimal structure quality is the topic of this work.
Item Description:Creative Commons (cc), https://creativecommons.org/licenses/by-sa/4.0/
Physical Description:1 electronic resource (X, 138 p. p.)
ISBN:9783731506799
1000070029