Introduction to microfabrication : the science of inkjet and droplets

This accessible text is now fully revised and updated, providing an overview of fabrication technologies and materials needed to realize modern microdevices. It demonstrates how common microfabrication principles can be applied in different applications, to create devices ranging from nanometer prob...

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Main Author: Franssila, Sami
Format: eBook
Language:English
Published: Chichester Wiley 2010
Edition:2. edition
Subjects:
Online Access:
Collection: Wiley Online Books - Collection details see MPG.ReNa
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520 3 |a This accessible text is now fully revised and updated, providing an overview of fabrication technologies and materials needed to realize modern microdevices. It demonstrates how common microfabrication principles can be applied in different applications, to create devices ranging from nanometer probe tips to meter scale solar cells, and a host of microelectronic, mechanical, optical and fluidic devices in between. Latest developments in wafer engineering, patterning, thin films, surface preparation and bonding are covered.