MEMS : a practical guide to design, analysis, and applications

Main Author: Korvink, J. G.
Other Authors: Paul, Oliver
Format: eBook
Language:English
Published: Norwich, NY W. Andrew Pub. c2006
Subjects:
Online Access:
Collection: Safari Tech Books Online - Collection details see MPG.ReNa
Item Description:"Micro-electro-mechanical systems"--Cover
Physical Description:1 online resource (xxvi, 965 p.) ill
ISBN:0815518285
9780815518280