Si Silicon Silicon Nitride in Microelectronics and Solar Cells
This is the first of three Gmelin Handbook volumes in the silicon se ries that will cover silicon nitride, a normaUy solid material with the idealized formula Si N . This volume, 3 4 "Silicon" Supplement Volume B Sc, is devoted to applications of silicon nitride in microelec tronics and s...
| Main Authors: | , |
|---|---|
| Other Authors: | |
| Format: | eBook |
| Language: | English |
| Published: |
Berlin, Heidelberg
Springer Berlin Heidelberg
1991, 1991
|
| Edition: | 8th ed. 1991 |
| Series: | Si. Silicium. Silicon (System-Nr. 15)
|
| Subjects: | |
| Online Access: | |
| Collection: | Springer Book Archives -2004 - Collection details see MPG.ReNa |
Table of Contents:
- 1 Introductory Remarks
- 2 Preparation and Patterning of Silicon Nitride Layers and Films
- 3 Silicon Nitride Application as Masks
- 4 Insulating Silicon Nitride Films
- 5 Silicon Nitride for Gettering
- 6 Silicon Nitride for Protecting and Passivating Devices. Improving the Radiation Resistance
- 7 Silicon Nitride in Encapsulation and Recrystallization
- 8 Silicon Nitride Applied for the Manufacture of Contacts and Interconnections
- 9 Silicon Nitride for Isolating Devices and Device Components
- 10 Silicon Nitride in Resistor Fabrication
- 11 Silicon Nitride Dielectrics and Masks in Capacitors
- 12 Silicon Nitride as Mask and Dielectric in Field Effect Devices
- 13 Silicon Nitride Substrates, Masks and Dielectrics in Thin-Film Devices on Insulators
- 14 Charge-Coupled Devices (CCDs)
- 15 Schottky Diodes
- 16 Silicon Nitride in Bipolar Devices (Diodes, Transistors and Thyristors)
- 17 Silicon Nitride in Integrated Circuit (IC) Technology
- 18 Silicon Nitride in Field Effect Transistor-Based Integrated Circuits (FET ICs)
- 19 Silicon Nitride in Bipolar Device-Based Integrated Circuits
- 20 Silicon Nitride in Random Access Memories (RAMs)
- 21 Read-Only Memories (ROMs)
- 22 Silicon Nitride in Compound Semiconductor Field Effect Transistors
- 23 Silicon Nitride in Light-Emitting Diodes (LEDs), Lasers and Displays
- 24 Silicon Nitride in Photoelectric Devices
- 25 Silicon Nitride in Compound Semiconductor Integrated Circuits (ICs)
- 26 Silicon Nitride in Integrated Optics
- 27 Silicon Nitride in Epitaxy and Superlattices
- 28 Silicon Nitride in High-Tc Superconductor and Superconducting Device Technology
- 29 Silicon Nitride in Sensors
- 30 Silicon Nitride in Magnetic Devices
- 31 Specific Applications of Silicon Nitride Films
- 32 Application of Silicon Nitride for SolarCells
- Abbreviations and Acronyms
- Physical Constants and Conversion Factors