Sputtering by Particle Bombardment II Sputtering of Alloys and Compounds, Electron and Neutron Sputtering, Surface Topography
| Other Authors: | |
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| Format: | eBook |
| Language: | English |
| Published: |
Berlin, Heidelberg
Springer Berlin Heidelberg
1983, 1983
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| Edition: | 1st ed. 1983 |
| Series: | Topics in Applied Physics
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| Subjects: | |
| Online Access: | |
| Collection: | Springer Book Archives -2004 - Collection details see MPG.ReNa |
Table of Contents:
- and overview
- Sputtering of multicomponent materials
- Chemical sputtering
- Sputtering by electrons and photons
- Sputtering of solids with neutrons
- Heavy ion sputtering induced surface topography development
- Development of surface topography due to gas ion implantation