Sputtering by Particle Bombardment I Physical Sputtering of Single-Element Solids

Bibliographic Details
Other Authors: Behrisch, R. (Editor)
Format: eBook
Language:English
Published: Berlin, Heidelberg Springer Berlin Heidelberg 1981, 1981
Edition:1st ed. 1981
Series:Topics in Applied Physics
Subjects:
Online Access:
Collection: Springer Book Archives -2004 - Collection details see MPG.ReNa
Description
Physical Description:XI, 284 p. 19 illus online resource
ISBN:9783540385141