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Novel Optical Technologies for Nanofabrication

Novel Optical Technologies for Nanofabrication describes recent advances made in micro/nanofabrication with super-resolution laser technologies, which are based on the latest research findings in the authors’ groups. It focuses on new  techniques and methods as well as applications and development t...

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Bibliographic Details
Main Authors: Liu, Qian, Duan, Xuanming (Author), Peng, Changsi (Author)
Format: eBook
Language:English
Published: Berlin, Heidelberg Springer Berlin Heidelberg 2014, 2014
Edition:1st ed. 2014
Series:Nanostructure Science and Technology
Subjects:
Nanophysics
Laser
Optical Materials
Nanoscience
Lasers
Microtechnology
Microsystems And Mems.
Nanotechnology
Microelectromechanical Systems
Online Access:
Collection: Springer eBooks 2005- - Collection details see MPG.ReNa
Table of Contents:
  • Introduction
  • Super-resolution Laser Direct Writing and Its Applications
  • Laser path-guided wrinkle structures
  • Laser Micro/Nanofabrication and Applications Based on Multiphoton Process
  • Laser Interference Nano-Fabrication
  • Super-Resolution Patterning and Photolithography Based on Surface Plasmon Polaritons
  • Mass production of large-format micro/nano-structure based optical devices

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