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131104 ||| eng |
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|a 9783642403873
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| 100 |
1 |
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|a Liu, Qian
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| 245 |
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|a Novel Optical Technologies for Nanofabrication
|h Elektronische Ressource
|c by Qian Liu, Xuanming Duan, Changsi Peng
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| 250 |
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|a 1st ed. 2014
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| 260 |
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|a Berlin, Heidelberg
|b Springer Berlin Heidelberg
|c 2014, 2014
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| 300 |
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|a IX, 267 p. 232 illus., 162 illus. in color
|b online resource
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| 505 |
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|a Introduction -- Super-resolution Laser Direct Writing and Its Applications -- Laser path-guided wrinkle structures -- Laser Micro/Nanofabrication and Applications Based on Multiphoton Process -- Laser Interference Nano-Fabrication -- Super-Resolution Patterning and Photolithography Based on Surface Plasmon Polaritons -- Mass production of large-format micro/nano-structure based optical devices
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| 653 |
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|a Nanophysics
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| 653 |
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|a Laser
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| 653 |
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|a Optical Materials
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| 653 |
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|a Nanoscience
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| 653 |
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|a Lasers
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| 653 |
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|a Microtechnology
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| 653 |
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|a Optical materials
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| 653 |
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|a Microsystems and MEMS.
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| 653 |
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|a Nanotechnology
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| 653 |
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|a Microelectromechanical systems
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| 700 |
1 |
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|a Duan, Xuanming
|e [author]
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| 700 |
1 |
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|a Peng, Changsi
|e [author]
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| 041 |
0 |
7 |
|a eng
|2 ISO 639-2
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| 989 |
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|b Springer
|a Springer eBooks 2005-
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| 490 |
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|a Nanostructure Science and Technology
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| 028 |
5 |
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|a 10.1007/978-3-642-40387-3
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| 856 |
4 |
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|u https://doi.org/10.1007/978-3-642-40387-3?nosfx=y
|x Verlag
|3 Volltext
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| 082 |
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|a 620.5
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| 520 |
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|a Novel Optical Technologies for Nanofabrication describes recent advances made in micro/nanofabrication with super-resolution laser technologies, which are based on the latest research findings in the authors’ groups. It focuses on new techniques and methods as well as applications and development trends in laser nanofabrication, including super-resolution laser direct writing, surface structures composed of laser path-guided wrinkle, three-dimensional laser nanofabrication based on two-photon absorption, and nanofabrication by laser interference and surface plasmon polaritons. This book serves as a reference for academic researchers, engineers, technical professionals and graduate students in the fields of micro/nanotechnology, thin film materials, super-resolution optics and laser techniques. Qian Liu is a Professor at Laboratory for Nanodevice, National Center for Nanoscience and Technology, China. Xuanming Duan is a Professor at the Key Laboratory of Functional Crystals and Laser Technology, Technical Institute of Physics and Chemistry, Chinese Academy of Sciences, China Changsi Peng is a Professor at the Institute of Information Optical Engineering, Soochow University, China
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