%0 eBook %M Solr-EB000411680 %I SPIE %D 2012 %C Bellingham, Wash. %B Proceedings of SPIE %@ 9780819488930 %T Reliability, Packaging, Testing, and Characterization of MEMS/MOEMS and Nanodevices XI %U https://www.spiedigitallibrary.org/conference-proceedings-of-spie/8250