Polymers in microlithography : materials and processes : developed from a symposium sponsored by the Division of Polymeric Materials: Science and Engineering at the 197th national meeting of the American Chemical Society, Dallas, Texas, April 9-14, 1989

Main Author: Reichmanis, Elsa
Corporate Authors: American Chemical Society Division of Polymeric Materials: Science and Engineering, American Chemical Society Meeting ( 1989, Dallas, Tex.)
Other Authors: MacDonald, Scott A., Iwayanagi, Takao
Format: eBook
Published: Washington, DC American Chemical Society 1989, 1989
Series:ACS symposium series
Online Access:
Collection: ACS Symposium Series - Collection details see MPG.ReNa
Item Description:Title from PDF title page (ACS publications, viewed Sept 8, 2009)
Physical Description:xii, 449 p. ill