Polymers in microlithography : materials and processes : developed from a symposium sponsored by the Division of Polymeric Materials: Science and Engineering at the 197th national meeting of the American Chemical Society, Dallas, Texas, April 9-14, 1989
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Corporate Authors: | , |
Other Authors: | , |
Format: | eBook |
Language: | English |
Published: |
Washington, DC
American Chemical Society
1989, 1989
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Series: | ACS symposium series
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Subjects: | |
Online Access: | |
Collection: | ACS Symposium Series - Collection details see MPG.ReNa |
Item Description: | Title from PDF title page (ACS publications, viewed Sept 8, 2009) |
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Physical Description: | xii, 449 p. ill |
ISBN: | 0841217017 9780841217010 |