Polymers for microelectronics : resists and dielectrics : developed from a symposium sponsored by the Division of Polymeric Materials: Science and Engineering, Inc., of the American Chemical Society and the Society of Polymer Science, Japan, at the 203rd National Meeting of the American Chemical Society, San Francisco, California, April 5-10, 1992

Main Author: Thompson, L. F.
Corporate Authors: American Chemical Society Division of Polymeric Materials: Science and Engineering, Kobunshi Gakkai (Japan), American Chemical Society Meeting ( 1992, San Francisco, Calif.)
Other Authors: Willson, C. G., Tagawa, Seiichi
Format: eBook
Published: Washington, DC American Chemical Society 1994, 1994
Series:ACS symposium series
Online Access:
Collection: ACS Symposium Series - Collection details see MPG.ReNa
Item Description:Title from PDF title page (ACS publications, viewed Sept 1, 2009)
Physical Description:xii, 571 p. ill