CMOS Hotplate Chemical Microsensors

This is the first comprehensive book on microhotplate-based chemical sensor systems in CMOS-technology. It covers all aspects of successful sensor prototyping: theory of transducer modelling, microelectronics design considerations, system design issues, and issues related to system and device microf...

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Main Authors: Graf, Markus, Barrettino, Diego (Author), Baltes, Henry P. (Author), Hierlemann, Andreas (Author)
Corporate Author: SpringerLink (Online service)
Format: eBook
Language:English
Published: Berlin, Heidelberg Springer Berlin Heidelberg 2007, 2007
Series:Microtechnology and MEMS
Subjects:
Online Access:
Collection: Springer eBooks 2005- - Collection details see MPG.ReNa
Table of Contents:
  • Miniaturized Metal-Oxide Sensors
  • Thermal Modelling of CMOS Microhotplates
  • Microhotplates in CMOS Technology
  • Monolithic Gas Sensor Systems
  • Microsensor Arrays
  • Conclusion and Outlook