CMOS Hotplate Chemical Microsensors

This is the first comprehensive book on microhotplate-based chemical sensor systems in CMOS-technology. It covers all aspects of successful sensor prototyping: theory of transducer modelling, microelectronics design considerations, system design issues, and issues related to system and device microf...

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Main Authors: Graf, Markus, Barrettino, Diego (Author), Baltes, Henry P. (Author), Hierlemann, Andreas (Author)
Corporate Author: SpringerLink (Online service)
Format: eBook
Language:English
Published: Berlin, Heidelberg Springer Berlin Heidelberg 2007, 2007
Series:Microtechnology and MEMS
Subjects:
Online Access:
Collection: Springer eBooks 2005- - Collection details see MPG.ReNa
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245 0 0 |a CMOS Hotplate Chemical Microsensors  |h Elektronische Ressource  |c by Markus Graf, Diego Barrettino, Henry P. Baltes, Andreas Hierlemann 
260 |a Berlin, Heidelberg  |b Springer Berlin Heidelberg  |c 2007, 2007 
300 |a XII, 125 p  |b online resource 
505 0 |a Miniaturized Metal-Oxide Sensors -- Thermal Modelling of CMOS Microhotplates -- Microhotplates in CMOS Technology -- Monolithic Gas Sensor Systems -- Microsensor Arrays -- Conclusion and Outlook 
653 |a Optical and Electronic Materials 
653 |a Physics and Applied Physics in Engineering 
653 |a Engineering 
653 |a Physical Chemistry 
653 |a Chemistry, Physical organic 
653 |a Optical materials 
700 1 |a Barrettino, Diego  |e [author] 
700 1 |a Baltes, Henry P.  |e [author] 
700 1 |a Hierlemann, Andreas  |e [author] 
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989 |b Springer  |a Springer eBooks 2005- 
490 0 |a Microtechnology and MEMS 
856 |u http://dx.doi.org/10.1007/978-3-540-69562-2?nosfx=y  |x Verlag  |3 Volltext 
520 |a This is the first comprehensive book on microhotplate-based chemical sensor systems in CMOS-technology. It covers all aspects of successful sensor prototyping: theory of transducer modelling, microelectronics design considerations, system design issues, and issues related to system and device microfabrication, packaging, and testing. A variety of different hotplates for different operation conditions is detailed and a family of metal-oxide-covered microhotplate-based microsensor systems with increasing complexity is presented. These systems belong to a new generation of chemical microsensors and represent examples of the successful integration of nanomaterials, microtechnology and microelectronics. The book provides students, scientists and engineers with an accessible introduction to the field of microhotplate-based chemical sensing, with all the necessary fundamental knowledge included. Beyond that, it also provides detailed information on all important issues concerning complex high-performance CMOS chemical microsensor systems; hence it will also be valuable to experts already familiar with the field