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Precision Nanometrology Sensors and Measuring Systems for Nanomanufacturing

Precision Nanometrology describes the new field of precision nanometrology, which plays an important part in nanoscale manufacturing of semiconductors, optical elements, precision parts and similar items. It pays particular attention to the measurement of surface forms of precision workpieces and to...

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Bibliographic Details
Main Author: Gao, Wei
Format: eBook
Language:English
Published: London Springer London 2010, 2010
Edition:1st ed. 2010
Series:Springer Series in Advanced Manufacturing
Subjects:
Measurement
Measuring Instruments
Measurement Science And Instrumentation
Microelectromechanical Systems
Microtechnology
Surfaces (physics)
Nanotechnology
Microsystems And Mems.
Machines, Tools, Processes
Control, Robotics, Automation
Manufactures
Surface And Interface And Thin Film
Automation
Robotics
Control Engineering
Online Access:
Collection: Springer eBooks 2005- - Collection details see MPG.ReNa
Table of Contents:
  • Angle Sensor for Measurement of Surface Slope and Tilt Motion
  • Laser Autocollimator for Measurement of Multi-axis Tilt Motion
  • Surface Encoder for Measurement of In-plane Motion
  • Grating Encoder for Measurement of In-plane and Out-of-plane Motion
  • Scanning Multi-probe System for Measurement of Roundness
  • Scanning Error Separation System for Measurement of Straightness
  • Scanning Micro-stylus System for Measurement of Micro-aspherics
  • Large Area Scanning Probe Microscope for Micro-textured Surfaces
  • Automatic Alignment Scanning Probe Microscope System for Measurement of 3D Nanostructures
  • Scanning Image-sensor System for Measurement of Micro-dimensions

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