Applications of Finite Element Methods for Reliability Studies on ULSI Interconnections

Applications of Finite Element Methods for Reliability Studies on ULSI Interconnections provides a detailed description of the application of finite element methods (FEMs) to the study of ULSI interconnect reliability. Over the past two decades the application of FEMs has become widespread and conti...

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Bibliographic Details
Main Authors: Tan, Cher Ming, Li, Wei (Author), Gan, Zhenghao (Author), Hou, Yuejin (Author)
Format: eBook
Language:English
Published: London Springer London 2011, 2011
Edition:1st ed. 2011
Series:Springer Series in Reliability Engineering
Subjects:
Online Access:
Collection: Springer eBooks 2005- - Collection details see MPG.ReNa
Table of Contents:
  • 1. Introduction
  • 2. Development of Physics-based Modeling for ULSI Interconnections Failure Mechanisms: Electromigration and Stress Induced Voiding
  • 3. Introduction and General Theory of Finite Element Method
  • 4. Finite Element Method for Electromigration Study
  • 5. Finite Element Method for Stress Induced Voiding
  • 6. Finite Element Method for Dielectric Reliability