Electroceramic-Based MEMS Fabrication-Technology and Applications
The book is focused on the use of functional oxide and nitride films to enlarge the application range of MEMS (microelectromechanical systems), including micro-sensors, micro-actuators, transducers, and electronic components for microwaves and optical communications systems. Applications, emerging a...
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| Format: | eBook |
| Language: | English |
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New York, NY
Springer US
2005, 2005
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| Edition: | 1st ed. 2005 |
| Series: | Electronic Materials: Science & Technology
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| Online Access: | |
| Collection: | Springer eBooks 2005- - Collection details see MPG.ReNa |
Table of Contents:
- Applications and Devices
- MEMS-Based Thin Film and Resonant Chemical Sensors
- Microactuators Based on Thin Films
- Micromachined Ultrasonic Transducers and Acoustic Sensors Based on Piezoelectric Thin Films
- Thick-Film Piezoelectric and Magnetostrictive Devices
- Micromachined Infrared Detectors Based on Pyroelectric Thin Films
- RF Bulk Acoustic Wave Resonators and Filters
- High Frequency Tuneable Devices Based on Thin Ferroelectric Films
- MEMS for Optical Functionality
- Materials, Fabrication-Technology, and Functionality
- Ceramic Thick Films for MEMS
- Thin Film Piezoelectrics for MEMS
- Science and Technology of High Dielectric Constant Thin Films and Materials Integration for Application to High Frequency Devices
- Permittivity, Tunability and Loss in Ferroelectrics for Reconfigurable High Frequency Electronics
- Microfabrication of Piezoelectric MEMS
- Non-Conventional Micro- and Nanopatterning Techniques for Electroceramics
- Low-Cost Patterning of Ceramic Thin Films