Proceedings IEEE Thirteenth Annual International Conference on Micro Electro Mechanical Systems (Cat. No.00CH36308)
| Format: | eBook |
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| Published: |
New York
The Institute of Electrical and Electronics Engineers, Inc.
2000
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| Subjects: | |
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| Collection: | IEEE Conference Proceedings - Collection details see MPG.ReNa |
| ISBN: | 0780352734 |
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