Proceedings IEEE The Tenth Annual International Workshop on Micro Electro Mechanical Systems. An Investigation of Micro Structures, Sensors, Actuators, Machines and Robots
| Format: | eBook |
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| Published: |
New York
The Institute of Electrical and Electronics Engineers, Inc.
1997
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| Collection: | IEEE Conference Proceedings - Collection details see MPG.ReNa |
| ISBN: | 0780337441 |
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