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| LEADER |
00591nmm a2200169 u 4500 |
| 001 |
EB000293918 |
| 003 |
EBX01000000000000000091781 |
| 005 |
00000000000000.0 |
| 007 |
cr||||||||||||||||||||| |
| 020 |
|
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|a 9780819474520
|
| 245 |
0 |
0 |
|a Reliability, Packaging, Testing, and Characterization of MEMS/MOEMS and Nanodevices VIII
|h Elektronische Ressource
|
| 260 |
|
|
|a Bellingham, Wash.
|b SPIE
|c 2009
|
| 989 |
|
|
|b SPIE
|a SPIE Conference Proceedings
|
| 490 |
0 |
|
|a Proceedings of SPIE
|
| 856 |
4 |
0 |
|u https://www.spiedigitallibrary.org/conference-proceedings-of-spie/7206
|x Verlag
|3 Volltext
|
| 082 |
0 |
|
|a 500
|
| 082 |
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|
|a 600
|