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dewey-ones:"621 - Applied physics"
product_txtF_mv:"ACS Symposium Series"
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1
Polymers in microlithography : materials and processes
Published 1989
American Chemical Society
Subjects:
“
...Plasma Gases /
pharmacology
...
”
Call Number:
TK7871.15.P6
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2
Polymeric materials for microelectronic applications : science and technology
Published 1995
American Chemical Society
Subjects:
“
...Phosphates /
pharmacology
...
”
Call Number:
TK7871.15.P6
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621 - Applied physics
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English
2
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ACS Symposium Series
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American Chemical Society Division of Polymeric Materials: Science and Engineering
2
American Chemical Society Meeting ( 1989, Dallas, Texas)
1
Horie, Kazuyuki
1
Ito, Hiroshi
1
Iwayanagi, Takao
1
Kōbunshi Gakkai (Japan) Polymers for Microelectronics and Photonics Group
1
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MacDonald, Scott A.
1
Polymers for Microelectronics (1993, Kawasaki, Japan)
1
Reichmanis, Elsa
1
Tagawa, Seiichi
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